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Features:  
• PolyGate™ technology with Multi-Gate™ and Probing-Gate™ functions capable of single and multi-focus imaging

• Up to 100 gates per channel with 2 Gsps sampling rate

• Windows® 7 Ultimate for multi-language and 64-bit capabilities

Inertially Balanced Linear Motor Scanner with counterweight to minimize vibrations and ensure optimal scanning results

• Tower-mounted scan reference platform and sample fixture

• Open-access scanning area makes loading and unloading easy and is capable of scanning JEDEC trays or a 300mm wafer

• Water recirculation and optional inline temperature control

SonoSimulator for simplified analysis of stacked die parts

Digital Image Analysis (DIA)™ uses advanced algorithms to quantify the acoustic data and allows you to set accurate, automatic, accept/reject criteria

Virtual Rescanning Mode (VRM)™ stores comprehensive data and enables you to perform a complete analysis of a sample, even when it is no longer available

Gen6™ C-SAM®
The New Generation of C-SAM Technology

The Gen6™ C-Mode Scanning Acoustic Microscope is the newest generation in Acoustic Microscopy Imaging (AMI) innovation. While taking the best from the Gen5™ (e.g. advanced features, aesthetics, and ergonomics), the Gen6 improves upon the rest and takes acoustic imaging to the next level.

The Gen6 delivers the broadest range of capabilities available. Whether your needs are for nondestructive failure analysis, process development, R&D, High-Rel qualification for a military application, or low/medium-volume screening, the Gen6 is the one C-SAM system that can meet all of your demands. Gen6 is perfect for a variety of applications, such as; Microelectronics, MEMS, SSL LEDs, Power Modules, Solar, High-Tech materials, etc.

As the ultimate laboratory analysis tool, the Gen6 includes SonoSimulator as a standard feature to simplify the analysis of devices with multiple thin layers.

Advanced Sonoscan capabilities such as PolyGate™, Virtual Rescanning Mode (VRM™), and available Frequency Domain Imaging (FDI™) add value and confidence. With its large, easy-access, illuminated scanning area, the Gen6 has the capability to efficiently scan everything from a single part, to a 300mm wafer, with its tower referenced scan and fixtures.

In addition to being packed with leading Sonoscan innovations, the Gen6 was carefully designed with the user in mind. Its ergonomic features make it comfortable and convenient to use. Its advanced applications Sonolytics™ software and new intuitive operator interface menus help maximize results, while saving operator time. Plus, its open access and illuminated tower referenced sample stage allow for easier loading and unloading of samples. The Gen6 is truly the new generation C-SAM, delivering a package of technology, ergonomics, and advanced Sonoscan-developed features that cannot be found anywhere else.


Download Gen6™ Brochure PDF

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